Large substrate resist coaters
Of course, the airflow control inside the chamber, along with the excellent maintainability of the resist spin coat unit.
This is an introduction to our large substrate resist coaters. It is a resist spin coat unit designed for large substrates. In addition to airflow control within the chamber, it excels in maintainability, and we can also offer models equipped with automatic transport systems suitable for large substrates. *For more details, please refer to the PDF materials or feel free to contact us.
- Company：ソフエンジニアリング
- Price：Other
